Radiofrequency magnetron sputtering High-k dielectrics Infrared absorption Nanostructure Thin film Lifetime Crystal structure IR spectroscopy Hybrid materials GENOMIQUE Semiconductors Terres rares HR STEM-HAADF MoS2 Quantum-well Optical properties Structural properties Photoluminescence Terbium Electroluminescence Sputtering Atom probe tomography Guide d'onde Rare earth Pulvérisation cathodique Rare-earth Silicon nitride Irradiation Al2O3 Waveguide Si nanocluster Hafnium silicates Matériaux hybrides Friction Microstructure Cerium FTIR Refractive index CoMoS Liposomes Oxide materials Hillocks Silicon nanocrystals Erbium Reactive magnetron sputtering Silicon photonics Copper Nanostructures M-lines SiC Epitaxy Microstructure physique Si-rich silicon oxide RF magnetron sputtering Raman scattering Citric acid Neodymium Couches minces semi-conductrices Computational electromagnetic methods Microstructure physics Electron paramagnetic resonance Hafnium silicate Oxides Waveguides Couches minces Thin films Energy transfer Fluorescence ADE-FDTD Multilayers Laser pyrolysis Nanostructured materials PZT Silicon nanoclusters Magnetron sputtering Nanoparticules Rare earths Oxide interface Films Silicon Silicium Down-conversion Nanostructuring Rare-earth ions Nanoparticles Pulvérisation magnétron radiofréquence Conductivity Luminescence Raman Feature erasure Doping Grazing incidence X-ray diffraction Phase transition Cathodoluminescence XRD Optical amplifiers Photovoltaic Oxygen vacancies AFM CO adsorption