Wet Chemical Etching of Pb(ZrTi)O 3 Ferroelectric Thin Films for Optical Waveguide Application - Equipe NIMPH du CIMAP - Nanomatériaux, Ions et Métamatériaux pour la PHotonique
Article Dans Une Revue Ferroelectrics Année : 2003

Wet Chemical Etching of Pb(ZrTi)O 3 Ferroelectric Thin Films for Optical Waveguide Application

Résumé

In order to develop optical waveguide structures using Pb(ZrTi)O3 ferroelectric thin films, chemical solution deposition and spin-coating on glass substrates were studied. Classical photolithography and wet chemical etching method were applied for the realization of linear and Mach-Zehnder type waveguide structures, having a width of up to 100 ¹m and a irregularity of the border in the 1 ¹m region for an overall length of 20 mm. Optical characterization allows to qualify the ferroelectric material in terms of use for telecommunication applications, coupling of laser light by the M-lines technique allows to study light propagation and the related propagation losses.
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Dates et versions

hal-01207794 , version 1 (28-03-2017)
hal-01207794 , version 2 (29-03-2017)

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Harmut W. Gundel, Julien Cardin, Dominique Averty, Ludovic Godet, Dominique Leduc, et al.. Wet Chemical Etching of Pb(ZrTi)O 3 Ferroelectric Thin Films for Optical Waveguide Application. Ferroelectrics, 2003, 288 (1), pp.303-313. ⟨10.1080/00150190390211125⟩. ⟨hal-01207794v2⟩
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