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Derniers dépôts
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Thibaut Meyer, Aurélie Girard, Christophe Cardinaud, Marek Bouška, Emeline Baudet, et al.. Investigation of plasma species, etch products and surface modification during etching of Ge, Sb and Se-based materials in CH 4 -H 2 -Ar plasmas. 25th International Symposium on Plasma Chemistry (ISPC25), May 2023, Kyoto, Japan. ⟨hal-04675793⟩
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T Meyer, A Girard, M Bouska, E Baudet, M Baillieul, et al.. Investigation of plasma species, etch products and surface modification during etching of Ge, Sb and Se-based materials in CH4-H2-Ar plasmas. 25th International Symposium on Plasma Chemistry (ISPC25), Takayuki Watanabe - Kyushu University; Satoshi Hamaguchi - Osaka University, May 2023, Kyoto, Japan. ⟨hal-04675788⟩
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S Chouteau, A Durocher-Jean, A Granier, M Richard-Plouet, L Stafford. Time-resolved analysis of Ar metastable and electron populations in low-pressure misty plasma processes using optical emission spectroscopy. Plasma Sources Science and Technology, 2024, 33 (7), pp.075016. ⟨10.1088/1361-6595/ad5d11⟩. ⟨hal-04672943⟩
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Simon Chouteau, L. Stafford, Agnès Granier, Antoine Goullet, Mireille Richard-Plouet. Handling Nanoparticle Content in Nanocomposite Thin Films Deposited by Misty Plasma Processes through Controlled Flash Boiling Atomization. Langmuir, 2024, 40 (6), pp.3015-3023. ⟨10.1021/acs.langmuir.3c03176⟩. ⟨hal-04549282⟩
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Issraa Shahine, Quentin Hatte, Maxime Harnois, Pierre-Yves Tessier. Large Area Freestanding Au Nanoporous Ultrathin Films Transfer Printed on Bendable Substrates and 3D Surfaces for Flexible Electronics. ACS Applied Electronic Materials, 2024, 6 (4), pp.2281-2288. ⟨10.1021/acsaelm.3c01771⟩. ⟨hal-04552765⟩
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Pascal Bargiela, Vincent Fernandez, Christophe Cardinaud, John Walton, Mark Greiner, et al.. Towards a reliable assessment of charging effects during surface analysis: Accurate spectral shapes of ZrO2 and Pd/ZrO2 via X-ray Photoelectron Spectroscopy. Applied Surface Science, 2021, 566, pp.150728. ⟨10.1016/j.apsusc.2021.150728⟩. ⟨hal-03355769⟩
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Allan Lebreton, Marie-Paule Besland, Pierre-Yves Jouan, Tatiana Signe, Cédric Mannequin, et al.. Control of microstructure and composition of reactively sputtered vanadium nitride thin films based on hysteresis curves and application to microsupercapacitors. Journal of Vacuum Science & Technology A, 2024, 42 (2), pp.023405. ⟨10.1116/5.0177028⟩. ⟨hal-04423908⟩
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Michael Rodriguez-Fano, Mohamad Haydoura, Julien Tranchant, Etienne Janod, Benoît Corraze, et al.. Enhancing the Resistive Memory Window through Band Gap Tuning in Solid Solution (Cr1–xVx)2O3. ACS Applied Materials & Interfaces, 2023, 15 (47), pp.54611-54621. ⟨10.1021/acsami.3c09387⟩. ⟨hal-04361024⟩
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J. Zgheib, L. Berthelot, J. Tranchant, N. Ginot, M.-P. Besland, et al.. Electron-enhanced high power impulse magnetron sputtering with a multilevel high power supply: Application to Ar/Cr plasma discharge. Journal of Vacuum Science & Technology A, 2023, 41 (6), pp.063003. ⟨10.1116/6.0002857⟩. ⟨hal-04299303⟩
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Nombre de documents
82
Nombre de notices
294
Mots-clés
Applications industrielles
AlN
Transmission electron microscopy
A Thin films
Optical properties
PECVD
Etching
A Chalcogenides
Band gap
Biomasse
CIGSe
Alloying
Optical interferometry
Carbon
CHLORINE PLASMAS
A Multilayers
Nanotubes
Thin film
Anatase
Oxides
B2 Semiconducting indium compounds
Amorphous
Nanocomposite
Thin films
Biofilms microbiens
Physical vapor deposition
Chalcogenide
CaTiO3Pr^3^+
Kirkendall effect
B1 Inorganic compounds
Structure
Mott insulators
Biocapteurs
Non-volatile memory
X-ray photoelectron spectroscopy
Low-pressure plasma processing
Sputtering
C Photoelectron spectroscopy
Optical waveguides
B Chemical synthesis
BOMBARDMENT
Vanadium Sesquioxide
Scanning electron microscopy
Integrated optics
B2 Semiconducting alloys
NEXAFS
A3 Physical vapor deposition processes
Argon InP chlorine etching inductive coupled plasma ICP modeling plasma sheath simulation
X-ray diffraction
AZO thin films
A1 Characterization
CNTs’ collapse
Calcined clay
Transfert d'énergie
Ablation laser
B3 Solar cells
Aluminium nitride
Capacitance
Spectroscopic ellipsometry
Colloidal solution
Rutile
Titanium dioxide
TiO2
Annealing
A-CNx
Aryl-diazonium salts
Buffer Couple
B2 Quaternary
Biomembranes
AuCu alloy
Copper
V2O3
Avalanche breakdown
Alzheimer's disease
Selenization
Films
Bixbyite
CH4
Plasmas froids
Atomic force microscopy
Resistive switching
Ambipolar material
Magnetron sputtering
Band alignment
TEM
Atomic layer etching
Mass spectrometry
Semiconductors
Bipolar resistive switching BRS
Amyloid precursor
Functionalization
Adsorption
Residual stress
Plasma etching
Carbon Nanotube
SF 6
Mott insulator
Sol-gel
XPS
3 nm in size